Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas
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Date
2003
Authors
Vladimirov, S V
Tsakadze, E L
Ostrikov, Kontyantyn
Storer, Robin George
Xu, S
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Ostrikov, K., Tsakadze, E.L., Xu, S.,
Vladimirov, S.V., & Storer, R.G., 2003. Nonlinear electromagnetic fields in 0.5 MHz
inductively coupled plasmas. Physics of Plasmas, 10(4), 1146-1151.