Self-assembled subnanolayers as interfacial adhesion enhancers and diffusion barriers for integrated circuits
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Date
2003
Authors
Ramanath, Ganpati
Cui, Ganglong
Ganesan, P Gopal
Guo, X
Ellis, Amanda Vera
Stukowski, Michael
Vijayamohanan, Kunjukrishna Pillai
Doppelt, Pascal
Lane, Michael W
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Ramanath, G., Cui, G., Ganesan, P.G.,
Guo, X., Ellis, A.V., Stukowski, M., Vijayamohanan, K., Doppelt, P., & Lane, M.,
2003. Self-assembled subnanolayers as interfacial adhesion enhancers and diffusion
barriers for integrated circuits. Applied Physics Letters, 83(2), 383-385.