Inductively coupled plasmas sustained by an internal oscillating current

dc.contributor.author Tsakadze, E L
dc.contributor.author Ostrikov, Kontyantyn
dc.contributor.author Xu, S
dc.contributor.author Storer, Robin George
dc.contributor.author Sugai, H
dc.date.accessioned 2013-01-02T00:36:25Z
dc.date.available 2013-01-02T00:36:25Z
dc.date.issued 2002
dc.description.abstract A global electromagnetic model of an inductively coupled plasma sustained by an internal oscillating current sheet in a cylindrical metal vessel is developed. The electromagnetic field structure, profiles of the rf power transferred to the plasma electrons, electron/ion number density, and working points of the discharge are studied, by invoking particle and power balance. It is revealed that the internal rf current with spatially invariable phase significantly improves the radial uniformity of the electromagnetic fields and the power density in the chamber as compared with conventional plasma sources with external flat spiral inductive coils. This configuration offers the possibility of controlling the rf power deposition in the azimuthal direction. en
dc.identifier.citation Tsakadze, E.L., Ostrikov, K.N., Xu, S., Storer, R. and Sugai, H., 2002. Inductively coupled plasmas sustained by an internal oscillating current. Journal of Applied Physics, 91, 1804. en
dc.identifier.issn 0021-8979
dc.identifier.uri http://hdl.handle.net/2328/26528
dc.language.iso en
dc.publisher American Institute of Physics en
dc.rights.license In Copyright
dc.subject Physics en
dc.subject Plasma en
dc.title Inductively coupled plasmas sustained by an internal oscillating current en
dc.type Article en
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