Polyelectrolyte nanolayers as diffusion barriers for Cu metallization

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Date
2003
Authors
Ganesan, Pethuraja Gopal
Gamba, Jason M
Ellis, Amanda Vera
Kane, Ravi
Ramanath, Ganpati
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Ganesan, P.G., Gamba, J., Ellis, A.V., Kane, R.S., & Ramanath, G., 2003. Polyelectrolyte nanolayers as diffusion barriers for Cu metallization. Applied Physics Letters, 83(16), 3302-3305.